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Электронная библиотека БГТУ
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Научный журнал "Труды БГТУ" (1993-2016)
Труды БГТУ. №3. Химия и технология неорганических веществ, 2000-2016
Труды БГТУ. №3. Химия и технология неорганических веществ, 2001
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Issue Date
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2001
Окисление тонких пленок вольфрама, меди, олова на воздухе
Шишкин, Николай Яковлевич
;
Башкиров, Леонид Андреевич
;
Жарский, Иван Михайлович
;
Черкасов, Вадим Анатольевич
;
Косов, Д. В.
;
Чеботарь, Оесана Адамовна
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Author
1
Башкиров, Леонид Андреевич
1
Жарский, Иван Михайлович
1
Косов, Д. В.
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магнетронное распыление
1
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пленки вольфрама
1
пленки меди
1
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тонкие пленки
Date issued
1
2001
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true