Protective Nanocomposite Vacuum Coatings Deposited by Separated Plasma Flows

Abstract

The way of generation of protective nanostructure vacuum coatings by separated plasma flows was investigated. In order to limit the crystallite growth in the coatings the compound of the growing condensate was doped by Al. Nanocrystalline (Ti,Al)N coatings with grain size 10-20 nm and microhardness 35-40 GPa by means of vacuum-arc deposition technique from the separated plasma flows were obtained. It was determined that purposeful alloying improved operational coatings properties, and allowed using them as protective layers, deposited on the working surfaces of the cutting tools during timber-based material processing.