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https://elib.belstu.by/handle/123456789/36115| Title: | Application of DC Magnetron Sputtering for Creation of Gas-Sensitive Indium Oxide Thin Films and Their Properties |
| Authors: | Luhin, V. Zarsky, I. Zhucowki, P. |
| Keywords: | technology gas sensitive semiconductor structures oxide thin films sputtering of indium magnetron sputtering by magnetron |
| Issue Date: | 2012 |
| Citation: | Application of DC Magnetron Sputtering for Creation of Gas-Sensitive Indium Oxide Thin Films and Their Properties / V. Luhin, I. Zarsky, P. Zhucowki // Acta Physica Polonica A. - 2012. - Vol. 123, № 5. - P. 837-839 |
| Abstract: | In this paper the technology of gas sensitive semiconductor structures based on oxide thin films by DC magnetron sputtering of indium with the subsequent thermal oxidation is developed. Structure, surface morphology and chemical composition of the obtained films have been investigated by electron diffraction, scanning electron microscopy, and X-ray photoelectron spectroscopy. Conditions of In₂O₃ films formation with higt selectivity and sensitivity to NO₂ are established. |
| URI: | https://elib.belstu.by/handle/123456789/36115 |
| Appears in Collections: | Статьи в зарубежных изданиях |
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