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https://elib.belstu.by/handle/123456789/36124| Title: | Micro-Raman Investigation of Hydrogen Localized in Cone-Shaped Defects Formed on the Silicon Wafer Surface |
| Authors: | Frantskevich, N. V. Fedotov, A. K. Frantskevich, A. V. Mazanik, N. V. |
| Keywords: | study of molecular hydrogen cone-shaped defects laser irradiation micro-Raman study |
| Issue Date: | 2014 |
| Citation: | Micro-Raman Investigation of Hydrogen Localized in Cone-Shaped Defects Formed on the Silicon Wafer Surface / N. V. Frantskevich [et al.] // Acta Physica Polonica A. - 2014. - Vol. 125, № 6. - P. 1332-1334 |
| Abstract: | The goal of this work is the micro-Raman study of molecular hydrogen localized in cone-shaped defects, which are formed on the surface of previously helium implanted and annealed Czocliralski Si wafers as a result of hydrogen plasma treatment. The line at ~ 4158 cm-1 corresponding to molecular hydrogen is observed in the Raman spectra when the laser beam is focused both on cone-shaped defects or defect-free regions of the surface. The laser irradiation of cone-shaped defects during micro-Raman experiments leads to intensity increase of this |
| URI: | https://elib.belstu.by/handle/123456789/36124 |
| Appears in Collections: | Публикации в зарубежных изданиях |
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